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For your mastery's I would consider trading Awareness for Expanded mind. Neither Mastery is particularly good but Anivia would benefit more from the extra MP than from the extra exp.
I find your need for Clarity somewhat disheartening, as I believe a good Anivia player should have superior MP management skills, but to each their own. If the extra mana makes you a better player than so be it.
+1 cause it's a decent build and very useful for beginner Anivia players.
Glad to see that there are some ppl that aren't blindly building ap runes. There's too many of those..
As for the build: switch to Greater Mark of Magic Penetration and Greater Glyph of Scaling Ability Power(/lvl) or Greater Glyph of Cooldown Reduction. Ap is primary in glyphs and magic pen is primary in marks.